Open access
Date
2013Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-010000270Publication status
publishedExternal links
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Publisher
ETHSubject
FERTIGUNG IN DER ELEKTROTECHNIK, ELEKTRONIK, MIKRO-, NANOELEKTRONIK; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); PRODUCTION IN ELECTRICAL ENGINEERING, ELECTRONICS, MICRO-, NANOELECTRONICS; MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)Organisational unit
02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.03627 - Nelson, Bradley J. / Nelson, Bradley J.
Notes
Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 21030, 2013.More
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ETH Bibliography
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