Clean integration of single-walled carbon nanotubes for electromechanical systems
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Author
Date
2013Type
- Doctoral Thesis
ETH Bibliography
yes
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https://doi.org/10.3929/ethz-a-009773215Publication status
publishedExternal links
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Journal / series
Scientific Reports on Micro and NanosystemsVolume
Publisher
Der Andere VerlagSubject
NANOELEKTROMECHANISCHE BAUELEMENTE, NEMS (ELEKTROTECHNIK); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); NANOELECTROMECHANICAL COMPONENTS, NEMS (ELECTRICAL ENGINEERING); TRANSISTOREN (ELEKTRONIK); PHOTOLITHOGRAPHIE (PHOTOGRAPHIE); PHOTOLITHOGRAPHY (PHOTOGRAPHY); NANOTUBES + CARBON NANOTUBES; TRANSISTORS (ELECTRONICS); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)Organisational unit
02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.03609 - Hierold, Christofer / Hierold, Christofer
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ETH Bibliography
yes
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