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Author
Date
2012Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-007604465Publication status
publishedExternal links
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Journal / series
Scientific Reports on Micro and NanosystemsVolume
Publisher
Der Andere VerlagSubject
Mikroelektromechanische Bauelemente; TACHOMETER (MECHANICS); DREHZAHLMESSUNG (MECHANIK); Mems; MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); GYROSCOPIC MEASURING METHODS (PHYSICS); Gyroskopische Messmethoden; Drehzahlmessung; GYROSKOPISCHE MESSMETHODEN (PHYSIK); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK)Organisational unit
02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.03609 - Hierold, Christofer / Hierold, Christofer
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ETH Bibliography
yes
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