Open access
Author
Date
2017Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-010869805Publication status
publishedExternal links
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Publisher
ETH ZürichSubject
FERTIGUNG IN DER ELEKTROTECHNIK, ELEKTRONIK, MIKRO-, NANOELEKTRONIK; MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); SCHWERE + GRAVITATION + PENDEL (MECHANIK); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); MIKROPARTIKEL + NANOPARTIKEL + MIKROSPHÄREN + NANOSPHÄREN (NANOTECHNOLOGIE); PRODUCTION IN ELECTRICAL ENGINEERING, ELECTRONICS, MICRO-, NANOELECTRONICS; MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); GRAVITY + PENDULUM THEORY (MECHANICS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING); MICROPARTICLES + MICROSPHERES + NANOPARTICLES + NANOSPHERES (NANOTECHNOLOGY)Organisational unit
02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.
Notes
Dissertation. ETH Zürich. 2017. No. 24085.More
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ETH Bibliography
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