Process development for a pressure sensor based on a suspended gate carbon nanotube field-effect transistor
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Author
Date
2015Type
- Doctoral Thesis
ETH Bibliography
yes
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https://doi.org/10.3929/ethz-a-010611068Publication status
publishedExternal links
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Journal / series
Scientific Reports on Micro and NanosystemsVolume
Publisher
ETH-ZürichSubject
DRUCKMESSUNG + MANOMETER + MESSDOSEN + BAROMETER (MECHANIK); MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); FELDEFFEKTTRANSISTOREN, FET (ELEKTRONIK); NANORÖHRCHEN + KOHLENSTOFFNANORÖHRCHEN; PRESSURE MEASUREMENT + BAROMETERS + MANOMETERS (MECHANICS); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); FIELD EFFECT TRANSISTORS, FET (ELECTRONICS); NANOTUBES + CARBON NANOTUBESOrganisational unit
02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.03609 - Hierold, Christofer / Hierold, Christofer
Notes
Dissertation. ETH-Zürich. 2015. Nr. 22907.More
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ETH Bibliography
yes
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