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Optically interrogated MEMS pressure sensor array
| Metadata Label | Value |
|---|---|
| Author(s): | Prochazka, Lukas |
| Publisher: | ETH, Institute of Fluiddynamics ETH Zurich |
| Citation: | Prochazka, Lukas. Optically interrogated MEMS pressure sensor array. ETH, Institute of Fluiddynamics ETH Zurich (2011). http://dx.doi.org/10.3929/ethz-a-006682813 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(114.47KB),
Fulltext
(9.56MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Optically interrogated MEMS pressure sensor array |
| Author(s) | Prochazka, Lukas |
| Publication Place | Zürich |
| Publisher | ETH, Institute of Fluiddynamics ETH Zurich |
| Publication Date | 2011 |
| Notes | Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 19581, 2011 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-006682813 |
| Subject(s) |
Electronics, Power Electronics and Mechatronics Fluid Dynamics, Plasma Physics |
| Keyword(s) |
MEASURING DEVICES SENSORS DETECTORS PHYSICS PRESSURE MEASUREMENT BAROMETERS MANOMETERS MECHANICS MICROELECTROMECHANICAL COMPONENTS ELECTRICAL ENGINEERING OPTOELECTRONIC DEVICES PHOTOELECTRONIC DEVICES OPTOELECTRONICS WIND TUNNELS TESTING MODEL STUDIES AERODYNAMICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-4592-01.pdf |
application/pdf | 114.47KB |
| Fulltext |
eth-4592-02.pdf |
application/pdf | 9.56MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=006682813 |
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| Downloads | 128 |  |
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E-Collection record created: Tue, 08 Nov 2011, 06:11:49 CET