Skip to main content
Skip to navigation
Skip to toolbar
Efficient 3D computation of electrostatic fields and forces in microsystems
| Metadata Label | Value |
|---|---|
| Author(s): | Bächtold, Martin |
| Publisher: | Physical Electronics Laboratory |
| Citation: | Bächtold, Martin. Efficient 3D computation of electrostatic fields and forces in microsystems. Physical Electronics Laboratory (1997). http://dx.doi.org/10.3929/ethz-a-001793808 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(136.21KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Efficient 3D computation of electrostatic fields and forces in microsystems |
| Author(s) | Bächtold, Martin |
| Publication Place | Zürich |
| Publisher | Physical Electronics Laboratory |
| Publication Date | 1997 |
| Notes | Diss. Techn. Wiss. ETH Zürich, Nr. 12165, 1997. Ref.: Henry Baltes ; Korref.: Jan. G. Korvink ; Korref.: Arokia Nathan |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-001793808 |
| ISBN | 3-907574-17-6 |
| Subject(s) | Microelectronics, Integrated Circuits |
| Keyword(s) |
MICROELECTROMECHANICAL COMPONENTS ELECTRICAL ENGINEERING VERY LARGE SCALE INTEGRATED CIRCUITS MICROELECTRONICS INTEGRATED CIRCUITS ELECTRIC FIELDS ELECTROSTATICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-40739-01.pdf |
application/pdf | 136.21KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001793808 |
Abstract Views and Downloads  |
||
|---|---|---|
| Views | 71 |  |
| Downloads | 32 |  |
| Abstract Views and Downloads by Country |
|||
|---|---|---|---|
 United States |
Views | 7 | |
| Downloads | 9 | |
|
 China |
Views | 35 | |
| Downloads | 7 | |
|
 |
Views | 12 | |
| Downloads | 5 | |
|
 Germany |
Views | 1 | |
| Downloads | 5 | |
|
 India |
Views | 3 | |
| Downloads | 3 | |
|
 United Kingdom |
Views | 2 | |
| Downloads | 2 | |
|
 Switzerland |
Views | 5 | |
| Downloads | 1 | |
|
 Taiwan |
Views | 3 | |
| Downloads | 0 | |
|
 Italy |
Views | 1 | |
| Downloads | 0 | |
|
 Japan |
Views | 1 | |
| Downloads | 0 | |
|
 Korea, Republic of |
Views | 1 | |
| Downloads | 0 | |
|
E-Collection record created: Wed, 18 Feb 2009, 16:05:21 CET