Closed access
Date
1997Type
- Doctoral Thesis
ETH Bibliography
yes
Altmetrics
Permanent link
https://doi.org/10.3929/ethz-a-001793787Publication status
publishedExternal links
Search print copy at ETH Library
Contributors
Examiner: Baltes, Heinrich P.
Publisher
Physical Electronics LaboratorySubject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK); MIKROELEKTROMECHANISCHE BAUELEMENTE, MEMS (ELEKTROTECHNIK); COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS); MICROELECTROMECHANICAL COMPONENTS, MEMS (ELECTRICAL ENGINEERING)Notes
Diss. Naturwiss. ETH Zürich, Nr. 12139, 1997. Ref.: H. Baltes ; Korref.: P. M. Sarro.More
Show all metadata
ETH Bibliography
yes
Altmetrics