Laser micromachining: New concept for fabrication of micro-optical elements in UV transparent materials
Open access
Date
2006Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-005275506Publication status
publishedExternal links
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Publisher
ETHSubject
MODERNE PRODUKTIONSTECHNIK; LASERSTRAHLBEARBEITUNG (SPANENDE UMFORMUNG); LASERABLATION (LASERTECHNIK); MIKROTECHNIK; OPTISCHE BAUELEMENTE (OPTISCHE INSTRUMENTE); BEUGUNGSGITTER, EBENE WELLEN (OPTIK); LINSEN (OPTISCHE INSTRUMENTE); ADVANCED PRODUCTION TECHNOLOGY; LASER PROCESSING OF MATERIALS (MACHINING); LASER ABLATIONS (LASER ENGINEERING); MICROTECHNOLOGY; OPTICAL ELEMENTS (OPTICAL INSTRUMENTS); DIFFRACTION GRATINGS, PLANE-WAVE DIFFRACTION (OPTICS); LENSES (OPTICAL INSTRUMENTS)Organisational unit
03421 - Wokaun, Alexander (emeritus)
Notes
Diss., Naturwissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 16903, 2006.More
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ETH Bibliography
yes
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