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Author
Date
2004Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-004830192Publication status
publishedExternal links
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Publisher
Physical Electronics LaboratorySubject
KOMPLEMENTÄRE METALLOXID-HALBLEITERSCHALTUNGEN, CMOS (MIKROELEKTRONIK); METAL OXIDE SEMICONDUCTOR-TRANSISTOREN, MOS (ELEKTRONIK); MIKROBEARBEITUNG (SPANENDE UMFORMUNG); COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS, CMOS (MICROELECTRONICS); METAL OXIDE SEMICONDUCTOR TRANSISTORS, MOS (ELECTRONICS); MICROMACHINING (MACHINING)Organisational unit
03263 - Baltes, Henry
Notes
Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 15438, 2004.More
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ETH Bibliography
yes
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