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Author
Date
2003Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-004624792Publication status
publishedExternal links
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Publisher
ETH ZürichSubject
LASERANWENDUNGEN (LASERTECHNIK); ALUMINIUM (METALLURGY); ERZEUGUNG DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); NANOSTRUKTURIERTE MATERIALIEN (PHYSIK DER KONDENSIERTEN MATERIE); NANOSTRUCTURED MATERIALS (CONDENSED MATTER PHYSICS); LASER APPLICATIONS (LASER ENGINEERING); PRODUCTION OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS); LITHOGRAPHIE + MIKROLITHOGRAPHIE + NANOLITHOGRAPHIE (MIKROELEKTRONIK); LITHOGRAPHY + MICROLITHOGRAPHY + NANOLITHOGRAPHY (MICROELECTRONICS); ALUMINIUM (METALLURGIE)Organisational unit
03444 - Stemmer, Andreas / Stemmer, Andreas
Notes
Diss., Technische Wissenschaften ETH Zürich, Nr. 15144, 2003.More
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ETH Bibliography
yes
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