Open access
Author
Date
2001Type
- Student Paper
ETH Bibliography
yes
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https://doi.org/10.3929/ethz-a-004312449Publication status
publishedPublisher
Laboratory for Surface Science and Technology, Department of Materials, Swiss Federal Institute of TechnologySubject
MONOSCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); LITHOGRAPHIE + MIKROLITHOGRAPHIE + NANOLITHOGRAPHIE (MIKROELEKTRONIK); MONOLAYERS (PHYSICS OF MOLECULAR SYSTEMS); LITHOGRAPHY + MICROLITHOGRAPHY + NANOLITHOGRAPHY (MICROELECTRONICS)Organisational unit
03389 - Spencer, Nicholas (emeritus) / Spencer, Nicholas (emeritus)
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ETH Bibliography
yes
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