Open access
Author
Date
2000Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-004002835Publication status
publishedExternal links
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Publisher
ETH ZürichSubject
LITHOGRAPHIE + MIKROLITHOGRAPHIE + NANOLITHOGRAPHIE (MIKROELEKTRONIK); WAFER (MIKROELEKTRONIK); LITHOGRAPHY + MICROLITHOGRAPHY + NANOLITHOGRAPHY (MICROELECTRONICS); WAFER (MICROELECTRONICS)Organisational unit
03251 - Prins, Roel
Notes
Diss. Naturwissenschaften ETH Zürich, Nr. 13691, 2000.More
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ETH Bibliography
yes
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