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Mechanical properties of CMOS thin films
| Metadata Label | Value |
|---|---|
| Author(s): | Ziebart, Volker |
| Publisher: | Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich |
| Citation: | Ziebart, Volker. Mechanical properties of CMOS thin films. Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich (1999). http://dx.doi.org/10.3929/ethz-a-003877316 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(463.76KB),
Fulltext
(10.69MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Mechanical properties of CMOS thin films |
| Author(s) | Ziebart, Volker |
| Publication Place | Zürich |
| Publisher | Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich |
| Publication Date | 1999 |
| Notes | Diss. Naturwissenschaften ETH Zürich, Nr. 13457, 2000 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-003877316 |
| ISBN | 3-89649-519-4 |
| Subject(s) |
Physics, General Electrical Engineering, General Werkstoffe allgemein |
| Keyword(s) |
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS MICROELECTRONICS DYNAMIC AND MECHANICAL PROPERTIES OF THIN FILMS PHYSICS OF MOLECULAR SYSTEMS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-23353-01.pdf |
application/pdf | 463.76KB |
| Fulltext |
eth-23353-02.pdf |
application/pdf | 10.69MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=003877316 |
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E-Collection record created: Fri, 18 Apr 2008, 21:54:40 CET