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3D-Probing system for micro-components
| Metadata Label | Value |
|---|---|
| Author(s): | Liebrich, Thomas |
| Publisher: | ETH |
| Citation: | Liebrich, Thomas. 3D-Probing system for micro-components. ETH (2012). http://dx.doi.org/10.3929/ethz-a-7335180 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(155.35KB),
Fulltext
(9.10MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | 3D-Probing system for micro-components |
| Author(s) | Liebrich, Thomas |
| Publication Place | Zürich |
| Publisher | ETH |
| Publication Date | 2012 |
| Notes | Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 20282 |
| Series |
Fortschritt-Berichte VDI. Reihe 8, Mess-, Steuerungs- und Regelungstechnik Nr. 1212 Zürcher Schriften zur Produktionstechnik - IWF - Institut für Werkzeugmaschinen und Fertigung |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-7335180 |
| ISBN | 978-3-18-521208-6 |
| Subject(s) |
Machines Electrical and Electronic Measuring Techniques |
| Keyword(s) |
MICROTECHNOLOGY METROLOGY WEIGHTS AND MEASURES COORDINATE MEASURING TECHNIQUES 3D MEASURING TECHNIQUE CAPACITIVE SENSORS STOCHASTIC APPROXIMATION |
| Organisational Unit | Department of Mechanical and Process Engineering |
| Online Publication Date | 2012 |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-5849-01.pdf |
application/pdf | 155.35KB |
| Fulltext |
eth-5849-02.pdf |
application/pdf | 9.10MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=007335180 |
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| Downloads | 119 |  |
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E-Collection record created: Tue, 31 Jul 2012, 04:26:10 CET