Electromigration behavior of a multi-layer metallization

Metadata Label	Value
Author(s):	Schönbächler, Edgar Arthur
Publisher:	Unknown
Citation:	Schönbächler, Edgar Arthur. Electromigration behavior of a multi-layer metallization. (1998). http://dx.doi.org/10.3929/ethz-a-001915406
Document Type:	Doctoral and Habilitation Theses
Documents:	Abstract (152.75KB)

Detailed Information

Metadata	Description
Title	Electromigration behavior of a multi-layer metallization
Author(s)	Schönbächler, Edgar Arthur
Publication Place	Zürich
Publication Date	1998
Notes	Diss. Techn. Wiss. ETH Zürich, Nr. 12560, 1998. Ref.: W. Fichtner ; Korref.: P. Fazan
Language	English
DOI	http://dx.doi.org/10.3929/ethz-a-001915406
Subject(s)	Electrical Engineering, General Electronics, Power Electronics and Mechatronics Metallurgie
Keyword(s)	ELECTROMIGRATION EFFECT OF THE ELECTRICAL FIELD ON THE STRIP CONDUCTORS OF INTEGRATED CIRCUITS MULTILAYERS PHYSICS OF MOLECULAR SYSTEMS METALLIZATION METALLURGY

Description	File Name	MIME Type	Size
Abstract	eth-41118-01.pdf	application/pdf	152.75KB

Description	URL
NEBIS Link	http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001915406

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