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Development and application of a model hierarchy for silicon process simulation
| Metadata Label | Value |
|---|---|
| Author(s): | Höfler, Alexander |
| Publisher: | Unknown |
| Citation: | Höfler, Alexander. Development and application of a model hierarchy for silicon process simulation. (1997). http://dx.doi.org/10.3929/ethz-a-001856511 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(204.09KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Development and application of a model hierarchy for silicon process simulation |
| Author(s) | Höfler, Alexander |
| Publication Place | Zürich |
| Publication Date | 1997 |
| Notes | Diss. Techn. Wiss. ETH Zürich, Nr. 12330, 1997. Ref.: W. Fichtner ; Korref.: S. Selberherr |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-001856511 |
| Subject(s) |
Electrical Engineering, General Semiconductor Technology |
| Keyword(s) |
SEMICONDUCTOR COMPONENTS ELECTRONIC COMPONENTS ELECTRONICS MATHEMATICAL MODELING IN ELECTRICAL ENGINEERING TELECOMMUNICATIONS MICROELECTRONICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-40943-01.pdf |
application/pdf | 204.09KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001856511 |
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E-Collection record created: Wed, 18 Feb 2009, 16:22:15 CET