Multi-degree-of-freedom micropositioning using stepping principles

Metadata Label Value
Author(s): Zesch, Wolfgang
Publisher: Unknown
Citation:

Zesch, Wolfgang. Multi-degree-of-freedom micropositioning using stepping principles. (1997). http://dx.doi.org/10.3929/ethz-a-001855164

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (184.05KB) , Fulltext (16.66MB)
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Detailed Information

Metadata Description
Title Multi-degree-of-freedom micropositioning using stepping principles
Author(s) Zesch, Wolfgang
Publication Place Zurich
Publication Date 1997
Notes Diss. Techn. Wiss. ETH Zürich, Nr. 12318, 1997. Ref.: G. Schweitzer ; Korref.: R. Y. Siegwart
DOI http://dx.doi.org/10.3929/ethz-a-001855164
Subject(s) Mechanical Engineering, General
Nanotechnology
Keyword(s) NANOTECHNOLOGY
MICROMECHANICS
MEASURING DEVICES
SENSORS
DETECTORS
PHYSICS
SERVO-DRIVES
ACTUATORS
AUTOMATIC CONTROL
Description File Name MIME Type Size
Abstract   eth-40935-01.pdf application/pdf 184.05KB
Fulltext   eth-40935-02.pdf application/pdf 16.66MB
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E-Collection record created: Wed, 18 Feb 2009, 16:21:40 CET