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Multi-degree-of-freedom micropositioning using stepping principles
| Metadata Label | Value |
|---|---|
| Autor(en): | Zesch, Wolfgang |
| Verlag: | Unbekannt |
| Zitierweise: | Zesch, Wolfgang. Multi-degree-of-freedom micropositioning using stepping principles. (1997). http://dx.doi.org/10.3929/ethz-a-001855164 |
| Dokumententyp: | Dissertationen und Habilitationen |
| Dokumente: |
Abstract
(184.05KB),
Fulltext
(16.66MB) |
Detailansicht
| Metadaten | Beschreibung |
|---|---|
| Title | Multi-degree-of-freedom micropositioning using stepping principles |
| Author(s) | Zesch, Wolfgang |
| Publication Place | Zurich |
| Publication Date | 1997 |
| Notes | Diss. Techn. Wiss. ETH Zürich, Nr. 12318, 1997. Ref.: G. Schweitzer ; Korref.: R. Y. Siegwart |
| DOI | http://dx.doi.org/10.3929/ethz-a-001855164 |
| Subject(s) |
Maschinenbau allgemein Nanotechnologie |
| Keyword(s) |
NANOTECHNOLOGIE MIKROMECHANIK MESSTECHNISCHE SONDEN SENSOREN DETEKTOREN PHYSIK STELLANTRIEBE STELLEINRICHTUNGEN AUTOMATISCHE REGELUNG |
| Beschreibung | Dateiname | MIME Type | Grösse |
|---|---|---|---|
| Abstract |
eth-40935-01.pdf |
application/pdf | 184.05KB |
| Fulltext |
eth-40935-02.pdf |
application/pdf | 16.66MB |
| Beschreibung | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001855164 |
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E-Collection record created: Wed, 18 Feb 2009, 16:21:40 CET