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Silicon hot film flow sensors
| Metadata Label | Value |
|---|---|
| Author(s): | Trautweiler, Stephan Franz |
| Publisher: | Physical Electronics Laboratory, ETH Zürich |
| Citation: | Trautweiler, Stephan Franz. Silicon hot film flow sensors. Physical Electronics Laboratory, ETH Zürich (1997). http://dx.doi.org/10.3929/ethz-a-001823691 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(206.44KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Silicon hot film flow sensors |
| Author(s) | Trautweiler, Stephan Franz |
| Publication Place | Zürich |
| Publisher | Physical Electronics Laboratory, ETH Zürich |
| Publication Date | 1997 |
| Notes | Diss. Techn. Wiss. ETH Zürich, Nr. 12185, 1997. Ref.: H. Baltes ; Korref.: J. Knutti |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-001823691 |
| ISBN | 3-907574-18-4 |
| Subject(s) |
Electrical Engineering, General Semiconductor Technology |
| Keyword(s) |
MEASUREMENT OF VELOCITY AND QUANTITY RATE OF FLUID FLOW SEMICONDUCTING SENSORS ELECTRONICS SILICON CHEMICAL ELEMENTS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-40814-01.pdf |
application/pdf | 206.44KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001823691 |
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E-Collection record created: Wed, 18 Feb 2009, 16:11:43 CET