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Deformable micromirror arrays by CMOS technology
| Metadata Label | Value |
|---|---|
| Author(s): | Bühler, Johannes |
| Publisher: | Physical Electronics Laboratory |
| Citation: | Bühler, Johannes. Deformable micromirror arrays by CMOS technology. Physical Electronics Laboratory (1997). http://dx.doi.org/10.3929/ethz-a-001793787 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(190.04KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Deformable micromirror arrays by CMOS technology |
| Author(s) | Bühler, Johannes |
| Publication Place | Zürich |
| Publisher | Physical Electronics Laboratory |
| Publication Date | 1997 |
| Notes | Diss. Naturwiss. ETH Zürich, Nr. 12139, 1997. Ref.: H. Baltes ; Korref.: P. M. Sarro |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-001793787 |
| ISBN | 3-907574-16-8 |
| Subject(s) | Microelectronics, Integrated Circuits |
| Keyword(s) |
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS MICROELECTRONICS MICROELECTROMECHANICAL COMPONENTS ELECTRICAL ENGINEERING |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-40738-01.pdf |
application/pdf | 190.04KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001793787 |
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E-Collection record created: Wed, 18 Feb 2009, 16:05:16 CET