Deformable micromirror arrays by CMOS technology

Metadata Label Value
Author(s): Bühler, Johannes
Publisher: Physical Electronics Laboratory
Citation:

Bühler, Johannes. Deformable micromirror arrays by CMOS technology. Physical Electronics Laboratory (1997). http://dx.doi.org/10.3929/ethz-a-001793787

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (190.04KB)
Import to Mendeley

Detailed Information

Metadata Description
Title Deformable micromirror arrays by CMOS technology
Author(s) Bühler, Johannes
Publication Place Zürich
Publisher Physical Electronics Laboratory
Publication Date 1997
Notes Diss. Naturwiss. ETH Zürich, Nr. 12139, 1997. Ref.: H. Baltes ; Korref.: P. M. Sarro
Language English
DOI http://dx.doi.org/10.3929/ethz-a-001793787
ISBN 3-907574-16-8
Subject(s) Microelectronics, Integrated Circuits
Keyword(s) COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS
MICROELECTRONICS
MICROELECTROMECHANICAL COMPONENTS
ELECTRICAL ENGINEERING
Description File Name MIME Type Size
Abstract   eth-40738-01.pdf application/pdf 190.04KB
Abstract Views and Downloads
Views 81  abstracts
Downloads 103  downloads

Abstract Views and Downloads by Country
Germany Views abstracts
Downloads 40  downloads
Views 23  abstracts
Downloads 21  downloads
United States Views abstracts
Downloads 16  downloads
Switzerland Views abstracts
Downloads downloads
China Views abstracts
Downloads downloads
Austria Views abstracts
Downloads downloads
United Kingdom Views abstracts
Downloads downloads
Israel Views abstracts
Downloads downloads
Netherlands Views abstracts
Downloads downloads
Italy Views abstracts
Downloads downloads
Japan Views abstracts
Downloads downloads
Korea, Republic of Views abstracts
Downloads downloads
Mexico Views abstracts
Downloads downloads
Turkey Views abstracts
Downloads downloads
Taiwan Views abstracts
Downloads downloads
Hong Kong Views abstracts
Downloads downloads
Canada Views abstracts
Downloads downloads
India Views abstracts
Downloads downloads
Serbia and Montenegro Views abstracts
Downloads downloads


E-Collection record created: Wed, 18 Feb 2009, 16:05:16 CET