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Strukturierung von Silizium mit niederenergetischen fokussierten Ionenstrahlen
| Metadata Label | Value |
|---|---|
| Author(s): | Nebiker, Peter Werner |
| Publisher: | Unknown |
| Citation: | Nebiker, Peter Werner. Strukturierung von Silizium mit niederenergetischen fokussierten Ionenstrahlen. (1997). http://dx.doi.org/10.3929/ethz-a-001784404 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(243.91KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Strukturierung von Silizium mit niederenergetischen fokussierten Ionenstrahlen |
| Author(s) | Nebiker, Peter Werner |
| Publication Place | Zürich |
| Publication Date | 1997 |
| Notes | Diss. Naturwiss. ETH Zürich, Nr. 12046, 1997. Ref.: H. R. Ott ; Korref.: K. Ensslin ; Korref.: M. Döbeli |
| Language | German |
| DOI | http://dx.doi.org/10.3929/ethz-a-001784404 |
| Subject(s) | Semiconductor Technology |
| Keyword(s) |
SEMICONDUCTOR MATERIALS ELECTRICAL ENGINEERING DOPING SEMICONDUCTOR TECHNOLOGY ION IMPLANTATION ELECTRODYNAMICS SILICON CRYSTALS INORGANIC CHEMISTRY SURFACES INTERFACES FRACTURE SURFACES PHYSICS OF MOLECULAR SYSTEMS DEFECTS AND IRREGULARITIES CRYSTALLOGRAPHY IN-SITU PROCESSING MICROELECTRONICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-40706-01.pdf |
application/pdf | 243.91KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001784404 |
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| Views | 38 |  |
| Downloads | 45 |  |
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E-Collection record created: Wed, 18 Feb 2009, 16:01:52 CET