Strukturierung von Silizium mit niederenergetischen fokussierten Ionenstrahlen

Metadata Label Value
Author(s): Nebiker, Peter Werner
Publisher: Unknown
Citation:

Nebiker, Peter Werner. Strukturierung von Silizium mit niederenergetischen fokussierten Ionenstrahlen. (1997). http://dx.doi.org/10.3929/ethz-a-001784404

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (243.91KB)
Import to Mendeley

Detailed Information

Metadata Description
Title Strukturierung von Silizium mit niederenergetischen fokussierten Ionenstrahlen
Author(s) Nebiker, Peter Werner
Publication Place Zürich
Publication Date 1997
Notes Diss. Naturwiss. ETH Zürich, Nr. 12046, 1997. Ref.: H. R. Ott ; Korref.: K. Ensslin ; Korref.: M. Döbeli
Language German
DOI http://dx.doi.org/10.3929/ethz-a-001784404
Subject(s) Semiconductor Technology
Keyword(s) SEMICONDUCTOR MATERIALS
ELECTRICAL ENGINEERING
DOPING
SEMICONDUCTOR TECHNOLOGY
ION IMPLANTATION
ELECTRODYNAMICS
SILICON CRYSTALS
INORGANIC CHEMISTRY
SURFACES
INTERFACES
FRACTURE SURFACES
PHYSICS OF MOLECULAR SYSTEMS
DEFECTS AND IRREGULARITIES
CRYSTALLOGRAPHY
IN-SITU PROCESSING
MICROELECTRONICS
Description File Name MIME Type Size
Abstract   eth-40706-01.pdf application/pdf 243.91KB
Abstract Views and Downloads
Views 75  abstracts
Downloads 55  downloads

Abstract Views and Downloads by Country
Germany Views 11  abstracts
Downloads 29  downloads
United States Views abstracts
Downloads downloads
Views 38  abstracts
Downloads downloads
China Views 19  abstracts
Downloads downloads
Switzerland Views abstracts
Downloads downloads
United Kingdom Views abstracts
Downloads downloads
Austria Views abstracts
Downloads downloads
Bulgaria Views abstracts
Downloads downloads
Spain Views abstracts
Downloads downloads
Italy Views abstracts
Downloads downloads


E-Collection record created: Wed, 18 Feb 2009, 16:01:52 CET