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Diagnostics and control pf plasma etching reactors for semiconductor manufacturing
| Metadata Label | Value |
|---|---|
| Author(s): | Bose, Abhijit Frank |
| Publisher: | Unknown |
| Citation: | Bose, Abhijit Frank. Diagnostics and control pf plasma etching reactors for semiconductor manufacturing. (1995). http://dx.doi.org/10.3929/ethz-a-001534130 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(123.08KB),
Fulltext
(6.27MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Diagnostics and control pf plasma etching reactors for semiconductor manufacturing |
| Author(s) | Bose, Abhijit Frank |
| Publication Place | Zürich |
| Publication Date | 1995 |
| Notes | Diss. Techn. Wiss. ETH Zürich, Nr. 11224, 1995. Ref.: H. Baltes ; Korref.: A. Nathan ; Korref.: F.-P. Steiner |
| DOI | http://dx.doi.org/10.3929/ethz-a-001534130 |
| ISBN | 3-907574-09-5 |
| Subject(s) | Semiconductor Technology |
| Keyword(s) |
PLASMA ETCHING MACHINING SEMICONDUCTORS SEMICONDUCTOR TECHNOLOGY ELECTRICAL ENGINEERING |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-40052-01.pdf |
application/pdf | 123.08KB |
| Fulltext |
eth-40052-02.pdf |
application/pdf | 6.27MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001534130 |
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E-Collection record created: Wed, 18 Feb 2009, 15:07:01 CET