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Solid modeling applied to three-dimensional semiconductor process simulation
| Metadata Label | Value |
|---|---|
| Author(s): | Westermann, Marc |
| Publisher: | Unknown |
| Citation: | Westermann, Marc. Solid modeling applied to three-dimensional semiconductor process simulation. (1995). http://dx.doi.org/10.3929/ethz-a-001469778 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(213.82KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Solid modeling applied to three-dimensional semiconductor process simulation |
| Author(s) | Westermann, Marc |
| Publication Place | Zürich |
| Publication Date | 1995 |
| Notes | Diss. Techn. Wiss. ETH Zürich, Nr. 11031, 1995. Ref.: W. Fichtner ; Korref.: O. Kübler |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-001469778 |
| Subject(s) | Semiconductor Technology |
| Keyword(s) |
THREE-DIMENSIONAL REPRESENTATION SEMICONDUCTOR COMPONENTS ELECTRONIC COMPONENTS ELECTRONICS PRODUCTION IN ELECTRICAL ENGINEERING MICRO- NANOELECTRONICS MATHEMATICAL MODELING IN ELECTRICAL ENGINEERING TELECOMMUNICATIONS MICROELECTRONICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-39870-01.pdf |
application/pdf | 213.82KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001469778 |
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E-Collection record created: Wed, 18 Feb 2009, 14:51:01 CET