Defekterzeugung in kristallinem Silizium durch Kohlenstoffcluster im MeV-Energiebereich

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Author(s): Fischer, Urs Stefan
Publisher: Unknown
Citation:

Fischer, Urs Stefan. Defekterzeugung in kristallinem Silizium durch Kohlenstoffcluster im MeV-Energiebereich. (1993). http://dx.doi.org/10.3929/ethz-a-000913699

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (204.76KB)
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Metadata Description
Title Defekterzeugung in kristallinem Silizium durch Kohlenstoffcluster im MeV-Energiebereich
Author(s) Fischer, Urs Stefan
Publication Place Zürich
Publication Date 1993
Notes Diss. Naturwiss. ETH Zürich, Nr. 10128, 1993. Ref.: H. R. Ott ; Korref.: V. Meyer ; Korref.: M. Suter
Language German
DOI http://dx.doi.org/10.3929/ethz-a-000913699
Subject(s) Physical Chemistry and Electrochemistry
Keyword(s) SILICON CRYSTALS
INORGANIC CHEMISTRY
ION IMPLANTATION
ELECTRODYNAMICS
POINT DEFECT CLUSTERS
CRYSTALLOGRAPHY
PHYSICS OF MOLECULAR SYSTEMS
CARBON
CHEMICAL ELEMENTS
POINT DEFECTS AND IMPURITIES
Description File Name MIME Type Size
Abstract   eth-39103-01.pdf application/pdf 204.76KB
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E-Collection record created: Wed, 18 Feb 2009, 13:50:31 CET