Defekterzeugung in kristallinem Silizium durch Kohlenstoffcluster im MeV-Energiebereich

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Author(s): Fischer, Urs Stefan
Publisher: Unknown
Citation:

Fischer, Urs Stefan. Defekterzeugung in kristallinem Silizium durch Kohlenstoffcluster im MeV-Energiebereich. (1993). http://dx.doi.org/10.3929/ethz-a-000913699

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (204.76KB)
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Metadata Description
Title Defekterzeugung in kristallinem Silizium durch Kohlenstoffcluster im MeV-Energiebereich
Author(s) Fischer, Urs Stefan
Publication Place Zürich
Publication Date 1993
Notes Diss. Naturwiss. ETH Zürich, Nr. 10128, 1993. Ref.: H. R. Ott ; Korref.: V. Meyer ; Korref.: M. Suter
Language German
DOI http://dx.doi.org/10.3929/ethz-a-000913699
Subject(s) Physical Chemistry and Electrochemistry
Keyword(s) SILICON CRYSTALS
ION IMPLANTATION
POINT DEFECT CLUSTERS
CARBON
POINT DEFECTS AND IMPURITIES
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Abstract   eth-39103-01.pdf application/pdf 204.76KB
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E-Collection record created: Wed, 18 Feb 2009, 13:50:31 CET