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Untersuchungen zur Schichtdickenabhängigkeit von Beweglichkeit und Dotierung in epitaxialen Siliziumschichten auf Spinell und Saphir
| Metadata Label | Value |
|---|---|
| Author(s): | Bänziger, Urs-Peter |
| Publisher: | Juris |
| Citation: | Bänziger, Urs-Peter. Untersuchungen zur Schichtdickenabhängigkeit von Beweglichkeit und Dotierung in epitaxialen Siliziumschichten auf Spinell und Saphir. Juris (1977). http://dx.doi.org/10.3929/ethz-a-000105446 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(140.78KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Untersuchungen zur Schichtdickenabhängigkeit von Beweglichkeit und Dotierung in epitaxialen Siliziumschichten auf Spinell und Saphir |
| Author(s) | Bänziger, Urs-Peter |
| Publication Place | Zürich |
| Publisher | Juris |
| Publication Date | 1977 |
| Notes | Diss. Naturwiss. ETH Zürich, Nr. 5836, 0000. Ref.: Baumann, E. ; Korref.: Olsen J.L. |
| Language | German |
| DOI | http://dx.doi.org/10.3929/ethz-a-000105446 |
| Subject(s) | Condensed Matter |
| Keyword(s) |
ELECTRONIC STRUCTURE OF THIN FILMS SILICON THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-34103-01.pdf |
application/pdf | 140.78KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=000105446 |
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| Downloads | 15 |  |
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E-Collection record created: Wed, 18 Feb 2009, 07:19:22 CET