Nanometer-scale technology and near-field characterization of InP-based planar photonic-crystal devices

Metadata Label Value
Author(s): Wüest, Robert Andre
Publisher: ETH
Citation:

Wüest, Robert Andre. Nanometer-scale technology and near-field characterization of InP-based planar photonic-crystal devices. ETH (2007). http://dx.doi.org/10.3929/ethz-a-005466098

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (432.20KB), Fulltext (6.37MB)
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Detailed Information

Metadata Description
Title Nanometer-scale technology and near-field characterization of InP-based planar photonic-crystal devices
Author(s) Wüest, Robert Andre
Publication Place Zürich
Publisher ETH
Publication Date 2007
Notes Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 17146, 2007
Language English
DOI http://dx.doi.org/10.3929/ethz-a-005466098
Subject(s) Nanotechnology
Keyword(s) PHOTONIC CRYSTALS
FIBRE OPTICS
OPTICAL WAVEGUIDES
ELECTRICAL OSCILLATION TECHNOLOGY
LITHOGRAPHY
MICROLITHOGRAPHY
NANOLITHOGRAPHY
MICROELECTRONICS
PROXIMITY EFFECT
CONDENSED MATTER PHYSICS
INDIUM PHOSPHIDES
INORGANIC CHEMISTRY
GALLLIUM-INDIUM-ARSENIC COMPOUNDS
PLASMA ETCHING
MACHINING
Description File Name MIME Type Size
Abstract   eth-29871-01.pdf application/pdf 432.20KB
Fulltext   eth-29871-02.pdf application/pdf 6.37MB
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E-Collection record created: Sat, 19 Apr 2008, 05:24:56 CET