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Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing
| Metadata Label | Value |
|---|---|
| Author(s): | Bachmann, Daniel |
| Publisher: | Der Andere Verlag |
| Citation: | Bachmann, Daniel. Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing. Der Andere Verlag (2007). http://dx.doi.org/10.3929/ethz-a-005417046 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(381.65KB),
Fulltext
(9.90MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Multicompliant MEMS for measurement of adhesion energies and pull-off forces in an electrostatic bearing |
| Author(s) | Bachmann, Daniel |
| Publication Place | Tönning |
| Publisher | Der Andere Verlag |
| Publication Date | 2007 |
| Notes | Diss., Technische Wissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 17154, 2007 |
| Series | Scientific reports on micro and nanosystems vol. 3 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-005417046 |
| ISBN | 978-3-89959-618-2 |
| Subject(s) |
Mechanical Engineering, General Electronics, Power Electronics and Mechatronics |
| Keyword(s) |
MICROELECTROMECHANICAL COMPONENTS ELECTRICAL ENGINEERING ELECTROSTATICS TECHNICAL APPLICATIONS BEARINGS BUSHINGS MACHINE COMPONENTS GYROSCOPIC MEASURING METHODS PHYSICS TACHOMETER MECHANICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-29751-01.pdf |
application/pdf | 381.65KB |
| Fulltext |
eth-29751-02.pdf |
application/pdf | 9.90MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=005417046 |
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E-Collection record created: Sat, 19 Apr 2008, 05:15:29 CET