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Dopant imaging and profiling of wide bandgap semiconductor devices
| Metadata Label | Value |
|---|---|
| Autor(en): | Buzzo, Marco |
| Verlag: | ETH |
| Zitierweise: | Buzzo, Marco. Dopant imaging and profiling of wide bandgap semiconductor devices. ETH (2007). http://dx.doi.org/10.3929/ethz-a-005353444 |
| Dokumententyp: | Dissertationen und Habilitationen |
| Dokumente: |
Abstract
(278.02KB) |
Detailansicht
| Metadaten | Beschreibung |
|---|---|
| Title | Dopant imaging and profiling of wide bandgap semiconductor devices |
| Author(s) | Buzzo, Marco |
| Publication Place | Zürich |
| Publisher | ETH |
| Publication Date | 2007 |
| Notes | Diss., Technische Wissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 16756, 2007 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-005353444 |
| Subject(s) |
Elektronik, Leistungselektronik und Mechatronik Halbleitertechnik |
| Keyword(s) |
BREITBANDHALBLEITER WBS HALBLEITERTECHNOLOGIE TRANSISTOREN TEGFET VFET MODFET MOSFET MESFET SGFET ISFET MISFET HFET JFET CIGFET POSFET ELEKTRONIK DOTIERUNG |
| Beschreibung | Dateiname | MIME Type | Grösse |
|---|---|---|---|
| Abstract |
eth-29391-01.pdf |
application/pdf | 278.02KB |
| Beschreibung | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=005353444 |
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E-Collection record created: Sat, 19 Apr 2008, 04:48:36 CET