Fabrication and characterization of SU-8 cantilevers with integrated tips designed for dip-pen nanolithography

Metadata Label Value
Author(s): Sidler, Katrin
Publisher: ETH, Eidgenössische Technische Hochschule Zürich, Mechanical Engineering
Citation:

Sidler, Katrin. Fabrication and characterization of SU-8 cantilevers with integrated tips designed for dip-pen nanolithography. ETH, Eidgenössische Technische Hochschule Zürich, Mechanical Engineering (2006). http://dx.doi.org/10.3929/ethz-a-005177681

Document Type: Master and Bachelor Theses  
Documents: Text (7.49MB)
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Detailed Information

Metadata Description
Title Fabrication and characterization of SU-8 cantilevers with integrated tips designed for dip-pen nanolithography
Author(s) Sidler, Katrin
Publication Place Zürich
Publisher ETH, Eidgenössische Technische Hochschule Zürich, Mechanical Engineering
Publication Date 2006
Notes Diploma thesis, ETH Zürich, 2006
Language English
DOI http://dx.doi.org/10.3929/ethz-a-005177681
Subject(s) Mechanical Engineering, General
Nanotechnology
Keyword(s) ADVANCED PRODUCTION TECHNOLOGY
LITHOGRAPHY
MICROLITHOGRAPHY
NANOLITHOGRAPHY
MICROELECTRONICS
Organisational Unit Department of Mechanical and Process Engineering
Online Publication Date 2006
Description File Name MIME Type Size
Text   eth-28642-01.pdf application/pdf 7.49MB
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E-Collection record created: Sat, 19 Apr 2008, 03:56:33 CET