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Fabrication and characterization of SU-8 cantilevers with integrated tips designed for dip-pen nanolithography
| Metadata Label | Value |
|---|---|
| Author(s): | Sidler, Katrin |
| Publisher: | ETH, Eidgenössische Technische Hochschule Zürich, Mechanical Engineering |
| Citation: | Sidler, Katrin. Fabrication and characterization of SU-8 cantilevers with integrated tips designed for dip-pen nanolithography. ETH, Eidgenössische Technische Hochschule Zürich, Mechanical Engineering (2006). http://dx.doi.org/10.3929/ethz-a-005177681 |
| Document Type: | Master Theses |
| Documents: |
Text
(7.49MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Fabrication and characterization of SU-8 cantilevers with integrated tips designed for dip-pen nanolithography |
| Author(s) | Sidler, Katrin |
| Publication Place | Zürich |
| Publisher | ETH, Eidgenössische Technische Hochschule Zürich, Mechanical Engineering |
| Publication Date | 2006 |
| Notes | Diploma thesis, ETH Zürich, 2006 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-005177681 |
| Subject(s) |
Mechanical Engineering, General Nanotechnology |
| Keyword(s) |
ADVANCED PRODUCTION TECHNOLOGY LITHOGRAPHY MICROLITHOGRAPHY NANOLITHOGRAPHY MICROELECTRONICS |
| Organisational Unit | Department of Mechanical and Process Engineering |
| Online Publication Date | 2006 |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Text |
eth-28642-01.pdf |
application/pdf | 7.49MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=005177681 |
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E-Collection record created: Sat, 19 Apr 2008, 03:56:33 CET