PECVD of SıOx films from oxygen and hexamethyldisiloxane in a double source reactor

Metadata Label Value
Author(s): Bieder, Andrea
Publisher: ETH
Citation:

Bieder, Andrea. PECVD of SıOx films from oxygen and hexamethyldisiloxane in a double source reactor. ETH (2006). http://dx.doi.org/10.3929/ethz-a-005151598

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (242.61KB) , Fulltext (6.77MB)
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Detailed Information

Metadata Description
Title PECVD of SıOx films from oxygen and hexamethyldisiloxane in a double source reactor
Author(s) Bieder, Andrea
Publication Place Zürich
Publisher ETH
Publication Date 2006
Notes Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 16418, 2006
Language English
DOI http://dx.doi.org/10.3929/ethz-a-005151598
Subject(s) Materials Testing, Properties
Keyword(s) SILICON OXIDES
INORGANIC CHEMISTRY
CHEMICAL VAPOUR DEPOSITION
PRODUCTION ENGINEERING
PROPERTIES OF THIN LAYERS
PHYSICS OF MOLECULAR SYSTEMS
Description File Name MIME Type Size
Abstract   eth-28534-01.pdf application/pdf 242.61KB
Fulltext   eth-28534-02.pdf application/pdf 6.77MB
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E-Collection record created: Sat, 19 Apr 2008, 03:48:02 CET