SiOx thin film deposition on particles by plasma enhanced chemical vapor deposition in a circulating fluidized bed reactor

Metadata Label Value
Author(s): Borer, Beat Urs
Publisher: ETH
Citation:

Borer, Beat Urs. SiOx thin film deposition on particles by plasma enhanced chemical vapor deposition in a circulating fluidized bed reactor. ETH (2005). http://dx.doi.org/10.3929/ethz-a-005142286

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (234.91KB) , Fulltext (8.27MB)
Import to Mendeley

Detailed Information

Metadata Description
Title SiOx thin film deposition on particles by plasma enhanced chemical vapor deposition in a circulating fluidized bed reactor
Author(s) Borer, Beat Urs
Publication Place Zürich
Publisher ETH
Publication Date 2005
Notes Diss., Technische Wissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 16183, 2006
Language English
DOI http://dx.doi.org/10.3929/ethz-a-005142286
Subject(s) Technical Chemistry, Process Engineering
Keyword(s) PRODUCTION OF THIN FILMS
CHEMICAL VAPOUR DEPOSITION
SEPARATING
SORTING
SIFTING
SCREENING
MICROSTRUCTURE OF MOLECULAR SYSTEMS
Description File Name MIME Type Size
Abstract   eth-28482-01.pdf application/pdf 234.91KB
Fulltext   eth-28482-02.pdf application/pdf 8.27MB
Abstract Views and Downloads
Views 173  abstracts
Downloads 826  downloads

Abstract Views and Downloads by Country
Views 32  abstracts
Downloads 215  downloads
Germany Views 26  abstracts
Downloads 132  downloads
United States Views 14  abstracts
Downloads 89  downloads
Switzerland Views 46  abstracts
Downloads 64  downloads
China Views 25  abstracts
Downloads 51  downloads
Korea, Republic of Views abstracts
Downloads 36  downloads
Japan Views abstracts
Downloads 30  downloads
Taiwan Views abstracts
Downloads 24  downloads
France Views abstracts
Downloads 22  downloads
India Views abstracts
Downloads 21  downloads
United Kingdom Views abstracts
Downloads 17  downloads
Italy Views abstracts
Downloads 15  downloads
Netherlands Views abstracts
Downloads 10  downloads
Canada Views abstracts
Downloads downloads
Brazil Views abstracts
Downloads downloads
Poland Views abstracts
Downloads downloads
Spain Views abstracts
Downloads downloads
Denmark Views abstracts
Downloads downloads
Iran, Islamic Republic of Views abstracts
Downloads downloads
Thailand Views abstracts
Downloads downloads
Turkey Views abstracts
Downloads downloads
Czech Republic Views abstracts
Downloads downloads
Libyan Arab Jamahiriya Views abstracts
Downloads downloads
Portugal Views abstracts
Downloads downloads
Romania Views abstracts
Downloads downloads
Australia Views abstracts
Downloads downloads
Austria Views abstracts
Downloads downloads
Belgium Views abstracts
Downloads downloads
Egypt Views abstracts
Downloads downloads
Hungary Views abstracts
Downloads downloads
Indonesia Views abstracts
Downloads downloads
Ireland Views abstracts
Downloads downloads
Israel Views abstracts
Downloads downloads
Russian Federation Views abstracts
Downloads downloads
Singapore Views abstracts
Downloads downloads
Sweden Views abstracts
Downloads downloads
Tunisia Views abstracts
Downloads downloads
Vietnam Views abstracts
Downloads downloads
Belarus Views abstracts
Downloads downloads
Chile Views abstracts
Downloads downloads
Croatia Views abstracts
Downloads downloads
Ethiopia Views abstracts
Downloads downloads
Europe Views abstracts
Downloads downloads
Finland Views abstracts
Downloads downloads
Greece Views abstracts
Downloads downloads
Kuwait Views abstracts
Downloads downloads
Luxembourg Views abstracts
Downloads downloads
Malaysia Views abstracts
Downloads downloads
Mexico Views abstracts
Downloads downloads
Norway Views abstracts
Downloads downloads
Pakistan Views abstracts
Downloads downloads
Philippines Views abstracts
Downloads downloads
Slovakia Views abstracts
Downloads downloads
Slovenia Views abstracts
Downloads downloads
Ukraine Views abstracts
Downloads downloads


E-Collection record created: Sat, 19 Apr 2008, 03:43:56 CET