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Deposition of SiOx diffusion barriers on flexible packaging materials by plasma enhanced chemical vapor deposition
| Metadata Label | Value |
|---|---|
| Author(s): | Grüniger, Andrea Susanne |
| Publisher: | Unknown |
| Citation: | Grüniger, Andrea Susanne. Deposition of SiOx diffusion barriers on flexible packaging materials by plasma enhanced chemical vapor deposition. (2004). http://dx.doi.org/10.3929/ethz-a-004904486 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(316.45KB),
Fulltext
(8.51MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Deposition of SiOx diffusion barriers on flexible packaging materials by plasma enhanced chemical vapor deposition |
| Author(s) | Grüniger, Andrea Susanne |
| Publication Place | Zürich |
| Publication Date | 2004 |
| Notes | Diss., Technische Wissenschaften, Eidgenössische Technische Hochschule ETH Zürich, Nr. 15684, 2005 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-004904486 |
| Subject(s) |
Condensed Matter Nanotechnology |
| Keyword(s) |
PRODUCTION OF THIN FILMS PHYSICS OF MOLECULAR SYSTEMS THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION SILICON DIOXIDE INORGANIC CHEMISTRY |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-27643-01.pdf |
application/pdf | 316.45KB |
| Fulltext |
eth-27643-02.pdf |
application/pdf | 8.51MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=004904486 |
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E-Collection record created: Sat, 19 Apr 2008, 02:42:51 CET