Microhotplate-based chemical sensor systems in CMOS technology

Metadata Label Value
Author(s): Graf, Markus
Publisher: Physical Electronics Laboratory
Citation:

Graf, Markus. Microhotplate-based chemical sensor systems in CMOS technology. Physical Electronics Laboratory (2004). http://dx.doi.org/10.3929/ethz-a-004830192

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (209.67KB)
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Detailed Information

Metadata Description
Title Microhotplate-based chemical sensor systems in CMOS technology
Author(s) Graf, Markus
Publication Place Zürich
Publisher Physical Electronics Laboratory
Publication Date 2004
Notes Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 15438, 2004
Language English
DOI http://dx.doi.org/10.3929/ethz-a-004830192
Subject(s) Microelectronics, Integrated Circuits
Electronics, Power Electronics and Mechatronics
Keyword(s) COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS
MICROELECTRONICS
METAL OXIDE SEMICONDUCTOR TRANSISTORS
ELECTRONICS
MICROMACHINING
MACHINING
Description File Name MIME Type Size
Abstract   eth-27421-01.pdf application/pdf 209.67KB
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E-Collection record created: Sat, 19 Apr 2008, 02:26:12 CET