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Microhotplate-based chemical sensor systems in CMOS technology
| Metadata Label | Value |
|---|---|
| Author(s): | Graf, Markus |
| Publisher: | Physical Electronics Laboratory |
| Citation: | Graf, Markus. Microhotplate-based chemical sensor systems in CMOS technology. Physical Electronics Laboratory (2004). http://dx.doi.org/10.3929/ethz-a-004830192 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(209.67KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Microhotplate-based chemical sensor systems in CMOS technology |
| Author(s) | Graf, Markus |
| Publication Place | Zürich |
| Publisher | Physical Electronics Laboratory |
| Publication Date | 2004 |
| Notes | Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 15438, 2004 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-004830192 |
| Subject(s) |
Microelectronics, Integrated Circuits Electronics, Power Electronics and Mechatronics |
| Keyword(s) |
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS MICROELECTRONICS METAL OXIDE SEMICONDUCTOR TRANSISTORS ELECTRONICS MICROMACHINING MACHINING |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-27421-01.pdf |
application/pdf | 209.67KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=004830192 |
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E-Collection record created: Sat, 19 Apr 2008, 02:26:12 CET