Microforce-sensing probes and methodologies for micromechanical and dimensional metrology

Metadata Label Value
Author(s): Muntwyler, Simon D.
Publisher: ETH
Citation:

Muntwyler, Simon D.. Microforce-sensing probes and methodologies for micromechanical and dimensional metrology. ETH (2010). http://dx.doi.org/10.3929/ethz-a-006427222

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (30.88KB) , Fulltext (34.43MB)
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Detailed Information

Metadata Description
Title Microforce-sensing probes and methodologies for micromechanical and dimensional metrology
Author(s) Muntwyler, Simon D.
Publication Place Zürich
Publisher ETH
Publication Date 2010
Notes Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 19447, 2010
Language English
DOI http://dx.doi.org/10.3929/ethz-a-006427222
Subject(s) Electronics, Power Electronics and Mechatronics
Mechanical Engineering, General
Keyword(s) DYNAMOMETRIC INDICATORS
MECHANICS
MICROMACHINE
MECHANICAL ENGINEERING
MECHATRONICS
ELECTRONICS
MEASURING DEVICES
SENSORS
DETECTORS
PHYSICS
Description File Name MIME Type Size
Abstract   eth-2655-01.pdf application/pdf 30.88KB
Fulltext   eth-2655-02.pdf application/pdf 34.43MB
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E-Collection record created: Sat, 30 Apr 2011, 04:25:24 CET