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PECVD of SiO₂-like thin films under continuous wave and pulsed modes
| Metadata Label | Value |
|---|---|
| Author(s): | Harf-Bapin, Elisabeth Ines |
| Publisher: | Unknown |
| Citation: | Harf-Bapin, Elisabeth Ines. PECVD of SiO₂-like thin films under continuous wave and pulsed modes. (2001). http://dx.doi.org/10.3929/ethz-a-004319846 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(273.47KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | PECVD of SiO₂-like thin films under continuous wave and pulsed modes |
| Author(s) | Harf-Bapin, Elisabeth Ines |
| Publication Place | Zürich |
| Publication Date | 2001 |
| Notes | Diss., Technische Wissenschaften ETH Zürich, Nr. 14355, 2002 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-004319846 |
| Subject(s) | Technical Chemistry, Process Engineering |
| Keyword(s) |
APPLIED PLASMA PHYSICS THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION PHYSICS OF MOLECULAR SYSTEMS PROPERTIES OF THIN LAYERS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-25075-01.pdf |
application/pdf | 273.47KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=004319846 |
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E-Collection record created: Fri, 18 Apr 2008, 23:46:12 CET