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CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors
| Metadata Label | Value |
|---|---|
| Author(s): | Hagleitner, Christoph |
| Publisher: | Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich |
| Citation: | Hagleitner, Christoph. CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors. Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich (2002). http://dx.doi.org/10.3929/ethz-a-004317559 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(322.75KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors |
| Author(s) | Hagleitner, Christoph |
| Publication Place | Zürich |
| Publisher | Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich |
| Publication Date | 2002 |
| Notes | Diss., Technische Wissenschaften ETH Zürich, Nr. 14511, 2002 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-004317559 |
| Subject(s) |
Microelectronics, Integrated Circuits Physics, General |
| Keyword(s) |
COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS MICROELECTRONICS GAS SENSORS PHYSICS MICROSENSORS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-25056-01.pdf |
application/pdf | 322.75KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=004317559 |
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E-Collection record created: Fri, 18 Apr 2008, 23:44:45 CET