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Stress-related problems in process simulation
| Metadata Label | Value |
|---|---|
| Author(s): | Zelenka, Stefan |
| Publisher: | Unknown |
| Citation: | Zelenka, Stefan. Stress-related problems in process simulation. (2001). http://dx.doi.org/10.3929/ethz-a-004183494 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(107.11KB),
Fulltext
(8.21MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Stress-related problems in process simulation |
| Author(s) | Zelenka, Stefan |
| Publication Place | Zürich |
| Publication Date | 2001 |
| Notes | Diss., Technische Wissenschaften ETH Zürich, Nr. 14220, 2001 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-004183494 |
| Subject(s) | Semiconductor Technology |
| Keyword(s) |
SEMICONDUCTOR COMPONENTS ELECTRONIC COMPONENTS ELECTRONICS PRODUCTION IN ELECTRICAL ENGINEERING MICRO- NANOELECTRONICS STRESS-STRAIN BEHAVIOUR ELASTOMECHANICS SEMICONDUCTOR MATERIALS ELECTRICAL ENGINEERING |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-24155-01.pdf |
application/pdf | 107.11KB |
| Fulltext |
eth-24155-02.pdf |
application/pdf | 8.21MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=004183494 |
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| Downloads | 298 |  |
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E-Collection record created: Fri, 18 Apr 2008, 22:52:29 CET