Encapsulated micromachined resonant force sensor

Metadata Label Value
Author(s): Haueis, Martin
Publisher: VDI
Citation:

Haueis, Martin. Encapsulated micromachined resonant force sensor. VDI (2001). http://dx.doi.org/10.3929/ethz-a-004140149

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (495.79KB)
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Detailed Information

Metadata Description
Title Encapsulated micromachined resonant force sensor
Author(s) Haueis, Martin
Publication Place Düsseldorf
Publisher VDI
Publication Date 2001
Notes Diss., Technische Wissenschaften ETH Zürich, Nr. 13983, 2001
Series Fortschritt-Berichte VDI. Reihe 9, Elektronik/Mikro- und Nanotechnik Nr. 338
Language English
DOI http://dx.doi.org/10.3929/ethz-a-004140149
ISBN 3-18-333809-2
Subject(s) Mechanics, Acoustics, Gravity, Relativity
Keyword(s) DYNAMOMETRIC INDICATORS
MICROMACHINE
RESONANCE OF SOUND WAVES
Description File Name MIME Type Size
Abstract   eth-24015-01.pdf application/pdf 495.79KB
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E-Collection record created: Fri, 18 Apr 2008, 22:43:09 CET