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Encapsulated micromachined resonant force sensor
| Metadata Label | Value |
|---|---|
| Author(s): | Haueis, Martin |
| Publisher: | VDI |
| Citation: | Haueis, Martin. Encapsulated micromachined resonant force sensor. VDI (2001). http://dx.doi.org/10.3929/ethz-a-004140149 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(495.79KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Encapsulated micromachined resonant force sensor |
| Author(s) | Haueis, Martin |
| Publication Place | Düsseldorf |
| Publisher | VDI |
| Publication Date | 2001 |
| Notes | Diss., Technische Wissenschaften ETH Zürich, Nr. 13983, 2001 |
| Series | Fortschritt-Berichte VDI. Reihe 9, Elektronik/Mikro- und Nanotechnik Nr. 338 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-004140149 |
| ISBN | 3-18-333809-2 |
| Subject(s) | Mechanics, Acoustics, Gravity, Relativity |
| Keyword(s) |
MICROMECHANICS DYNAMOMETRIC INDICATORS MECHANICS RESONANCE OF SOUND WAVES ACOUSTICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-24015-01.pdf |
application/pdf | 495.79KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=004140149 |
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E-Collection record created: Fri, 18 Apr 2008, 22:43:09 CET