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MOCVD and tribological properties of thin zirconium carbonitride films
| Metadata Label | Value |
|---|---|
| Author(s): | Allenbach, Christian Peter |
| Publisher: | Unknown |
| Citation: | Allenbach, Christian Peter. MOCVD and tribological properties of thin zirconium carbonitride films. (2000). http://dx.doi.org/10.3929/ethz-a-004064305 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(366.65KB),
Fulltext
(14.08MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | MOCVD and tribological properties of thin zirconium carbonitride films |
| Author(s) | Allenbach, Christian Peter |
| Publication Place | Zürich |
| Publication Date | 2000 |
| Notes | Diss., Technische Wissenschaften ETH Zürich, Nr.13832, 2000 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-004064305 |
| Subject(s) | Condensed Matter |
| Keyword(s) |
CHEMICAL THIN-LAYER FORMATION PHYSICS OF MOLECULAR SYSTEMS CHEMICAL VAPOUR DEPOSITION PRODUCTION ENGINEERING ZIRCONIUM COMPOUNDS INORGANIC CHEMISTRY LUBRICATION TRIBOLOGY MECHANICAL ENGINEERING |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-23811-01.pdf |
application/pdf | 366.65KB |
| Fulltext |
eth-23811-02.pdf |
application/pdf | 14.08MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=004064305 |
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E-Collection record created: Fri, 18 Apr 2008, 22:28:42 CET