MOCVD and tribological properties of thin zirconium carbonitride films

Metadata Label Value
Author(s): Allenbach, Christian Peter
Publisher: Unknown
Citation:

Allenbach, Christian Peter. MOCVD and tribological properties of thin zirconium carbonitride films. (2000). http://dx.doi.org/10.3929/ethz-a-004064305

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (366.65KB), Fulltext (14.08MB)
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Detailed Information

Metadata Description
Title MOCVD and tribological properties of thin zirconium carbonitride films
Author(s) Allenbach, Christian Peter
Publication Place Zürich
Publication Date 2000
Notes Diss., Technische Wissenschaften ETH Zürich, Nr.13832, 2000
Language English
DOI http://dx.doi.org/10.3929/ethz-a-004064305
Subject(s) Condensed Matter
Keyword(s) CHEMICAL THIN-LAYER FORMATION
PHYSICS OF MOLECULAR SYSTEMS
CHEMICAL VAPOUR DEPOSITION
PRODUCTION ENGINEERING
ZIRCONIUM COMPOUNDS
INORGANIC CHEMISTRY
LUBRICATION
TRIBOLOGY
MECHANICAL ENGINEERING
Description File Name MIME Type Size
Abstract   eth-23811-01.pdf application/pdf 366.65KB
Fulltext   eth-23811-02.pdf application/pdf 14.08MB
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E-Collection record created: Fri, 18 Apr 2008, 22:28:42 CET