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Mesh Generation algorithms for three-dimensional semiconductor process simulation
| Metadata Label | Value |
|---|---|
| Author(s): | Villablanca, Luis |
| Publisher: | Unknown |
| Citation: | Villablanca, Luis. Mesh Generation algorithms for three-dimensional semiconductor process simulation. (2000). http://dx.doi.org/10.3929/ethz-a-003930584 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(99.77KB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Mesh Generation algorithms for three-dimensional semiconductor process simulation |
| Author(s) | Villablanca, Luis |
| Publication Place | Zürich |
| Publication Date | 2000 |
| Notes | Diss. Technische Wissenschaften ETH Zürich, Nr. 13634, 2000 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-003930584 |
| Subject(s) |
Semiconductor Technology Electrical Engineering, General Angewandte Mathematik |
| Keyword(s) |
SEMICONDUCTOR MATERIALS ELECTRICAL ENGINEERING PRODUCTION IN ELECTRICAL ENGINEERING ELECTRONICS MICRO- NANOELECTRONICS MATHEMATICAL MODELING IN ELECTRICAL ENGINEERING TELECOMMUNICATIONS MICROELECTRONICS MULTIGRID METHODS GRID GENERATION NUMERICAL MATHEMATICS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-23588-01.pdf |
application/pdf | 99.77KB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=003930584 |
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E-Collection record created: Fri, 18 Apr 2008, 22:13:06 CET