Development of a plasma enhanced chemical vapour deposition system

Metadata Label Value
Author(s): Rosenblad, Carsten
Publisher: Unknown
Citation:

Rosenblad, Carsten. Development of a plasma enhanced chemical vapour deposition system. (2000). http://dx.doi.org/10.3929/ethz-a-003927242

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (227.71KB) , Fulltext (11.12MB)
Import to Mendeley

Detailed Information

Metadata Description
Title Development of a plasma enhanced chemical vapour deposition system
Author(s) Rosenblad, Carsten
Publication Place Zürich
Publication Date 2000
Notes Diss. Naturwissenschaften ETH Zürich, Nr. 13601, 2000
Language English
DOI http://dx.doi.org/10.3929/ethz-a-003927242
Subject(s) Fluid Dynamics, Plasma Physics
Keyword(s) APPLIED PLASMA PHYSICS
CHEMICAL VAPOUR DEPOSITION
PRODUCTION ENGINEERING
THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION
PHYSICS OF MOLECULAR SYSTEMS
HETEROJUNCTION
HETEROSTRUCTURE
CRYSTALLOGRAPHY
Description File Name MIME Type Size
Abstract   eth-23566-01.pdf application/pdf 227.71KB
Fulltext   eth-23566-02.pdf application/pdf 11.12MB
Abstract Views and Downloads
Views 155  abstracts
Downloads 348  downloads

Abstract Views and Downloads by Country
Views 41  abstracts
Downloads 89  downloads
Germany Views 13  abstracts
Downloads 84  downloads
United States Views 23  abstracts
Downloads 39  downloads
Switzerland Views 11  abstracts
Downloads 23  downloads
China Views 24  abstracts
Downloads 15  downloads
Netherlands Views abstracts
Downloads downloads
India Views abstracts
Downloads downloads
Italy Views abstracts
Downloads downloads
Japan Views abstracts
Downloads downloads
Austria Views abstracts
Downloads downloads
France Views abstracts
Downloads downloads
United Kingdom Views abstracts
Downloads downloads
Korea, Republic of Views abstracts
Downloads downloads
Spain Views abstracts
Downloads downloads
Canada Views abstracts
Downloads downloads
Libyan Arab Jamahiriya Views abstracts
Downloads downloads
Russian Federation Views abstracts
Downloads downloads
Turkey Views abstracts
Downloads downloads
Algeria Views abstracts
Downloads downloads
Brazil Views abstracts
Downloads downloads
Iran, Islamic Republic of Views abstracts
Downloads downloads
Jordan Views abstracts
Downloads downloads
Sweden Views abstracts
Downloads downloads
Tunisia Views abstracts
Downloads downloads
Argentina Views abstracts
Downloads downloads
Belgium Views abstracts
Downloads downloads
Bosnia and Herzegovina Views abstracts
Downloads downloads
Czech Republic Views abstracts
Downloads downloads
Denmark Views abstracts
Downloads downloads
Indonesia Views abstracts
Downloads downloads
Iraq Views abstracts
Downloads downloads
Kuwait Views abstracts
Downloads downloads
Lithuania Views abstracts
Downloads downloads
Norway Views abstracts
Downloads downloads
Philippines Views abstracts
Downloads downloads
Romania Views abstracts
Downloads downloads
Serbia and Montenegro Views abstracts
Downloads downloads
Taiwan Views abstracts
Downloads downloads
Thailand Views abstracts
Downloads downloads
United Arab Emirates Views abstracts
Downloads downloads
Egypt Views abstracts
Downloads downloads
Liechtenstein Views abstracts
Downloads downloads
Poland Views abstracts
Downloads downloads
Ukraine Views abstracts
Downloads downloads


E-Collection record created: Fri, 18 Apr 2008, 22:11:22 CET