An industrial CMOS process family for integrated silicon sensors

Metadata Label Value
Author(s): Müller, Thomas
Publisher: Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich
Citation:

Müller, Thomas. An industrial CMOS process family for integrated silicon sensors. Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich (1999). http://dx.doi.org/10.3929/ethz-a-003877470

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (407.56KB) , Fulltext (13.88MB)
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Detailed Information

Metadata Description
Title An industrial CMOS process family for integrated silicon sensors
Author(s) Müller, Thomas
Publication Place Zürich
Publisher Physical Electronics Laboratory, Swiss Federal Institute of Technology (ETH) Zürich
Publication Date 1999
Notes Diss. Naturwissenschaften ETH Zürich, Nr. 13463, 2000
Language English
DOI http://dx.doi.org/10.3929/ethz-a-003877470
ISBN 3-89649-521-6
Subject(s) Microelectronics, Integrated Circuits
Keyword(s) COMPLEMENTARY-METAL-OXIDE-SEMICONDUCTOR CIRCUITS
MICROELECTRONICS
MICROSENSORS
PHYSICS
Description File Name MIME Type Size
Abstract   eth-23354-01.pdf application/pdf 407.56KB
Fulltext   eth-23354-02.pdf application/pdf 13.88MB
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E-Collection record created: Fri, 18 Apr 2008, 21:54:45 CET