Skip to main content
Skip to navigation
Skip to toolbar
Aufbringung von Siliziumschichten durch Plasma-CVD und Anwendung auf Beschichtungen in einer Plasma-Wirbelschicht
| Metadata Label | Value |
|---|---|
| Author(s): | Bayer, Christian |
| Publisher: | VDI Verlag |
| Citation: | Bayer, Christian. Aufbringung von Siliziumschichten durch Plasma-CVD und Anwendung auf Beschichtungen in einer Plasma-Wirbelschicht. VDI Verlag (1998). http://dx.doi.org/10.3929/ethz-a-001915475 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(19.15KB),
Fulltext
(13.66MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Aufbringung von Siliziumschichten durch Plasma-CVD und Anwendung auf Beschichtungen in einer Plasma-Wirbelschicht |
| Author(s) | Bayer, Christian |
| Publication Place | Düsseldorf |
| Publisher | VDI Verlag |
| Publication Date | 1998 |
| Notes | Diss. Techn. Wiss. ETH Zürich, Nr. 12502, 1998. Ref.: Ph. Rudolf von Rohr ; Korref.: J. Engemann |
| Series | Fortschritt-Berichte VDI. Reihe 3, Verfahrenstechnik Nr. 534 |
| Language | German |
| DOI | http://dx.doi.org/10.3929/ethz-a-001915475 |
| ISBN | 3-18-353403-7 |
| Subject(s) | Mechanical Engineering, General |
| Keyword(s) |
APPLIED PLASMA PHYSICS CHEMICAL VAPOUR DEPOSITION PRODUCTION ENGINEERING SILICON OXIDES INORGANIC CHEMISTRY THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION PHYSICS OF MOLECULAR SYSTEMS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-22578-01.pdf |
application/pdf | 19.15KB |
| Fulltext |
eth-22578-02.pdf |
application/pdf | 13.66MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=001915475 |
Abstract Views and Downloads  |
||
|---|---|---|
| Views | 260 |  |
| Downloads | 837 |  |
| Abstract Views and Downloads by Country |
|||
|---|---|---|---|
 Germany |
Views | 157 | |
| Downloads | 581 | |
|
 |
Views | 24 | |
| Downloads | 100 | |
|
 Switzerland |
Views | 32 | |
| Downloads | 56 | |
|
 Austria |
Views | 5 | |
| Downloads | 25 | |
|
 United States |
Views | 16 | |
| Downloads | 18 | |
|
 Japan |
Views | 1 | |
| Downloads | 9 | |
|
 United Kingdom |
Views | 3 | |
| Downloads | 9 | |
|
 Korea, Republic of |
Views | 0 | |
| Downloads | 7 | |
|
 Sweden |
Views | 1 | |
| Downloads | 4 | |
|
 China |
Views | 6 | |
| Downloads | 3 | |
|
 Denmark |
Views | 0 | |
| Downloads | 2 | |
|
 Netherlands |
Views | 2 | |
| Downloads | 2 | |
|
 Russian Federation |
Views | 2 | |
| Downloads | 2 | |
|
 Taiwan |
Views | 1 | |
| Downloads | 2 | |
|
 Turkey |
Views | 0 | |
| Downloads | 2 | |
|
 Belgium |
Views | 2 | |
| Downloads | 1 | |
|
 Bhutan |
Views | 0 | |
| Downloads | 1 | |
|
 Brazil |
Views | 0 | |
| Downloads | 1 | |
|
 Bulgaria |
Views | 0 | |
| Downloads | 1 | |
|
 Canada |
Views | 0 | |
| Downloads | 1 | |
|
 Croatia |
Views | 0 | |
| Downloads | 1 | |
|
 Europe |
Views | 0 | |
| Downloads | 1 | |
|
 France |
Views | 2 | |
| Downloads | 1 | |
|
 Italy |
Views | 1 | |
| Downloads | 1 | |
|
 Luxembourg |
Views | 1 | |
| Downloads | 1 | |
|
 Malaysia |
Views | 0 | |
| Downloads | 1 | |
|
 Poland |
Views | 1 | |
| Downloads | 1 | |
|
 Singapore |
Views | 0 | |
| Downloads | 1 | |
|
 Spain |
Views | 0 | |
| Downloads | 1 | |
|
 Ukraine |
Views | 0 | |
| Downloads | 1 | |
|
 Israel |
Views | 1 | |
| Downloads | 0 | |
|
 Panama |
Views | 1 | |
| Downloads | 0 | |
|
 Slovenia |
Views | 1 | |
| Downloads | 0 | |
|
E-Collection record created: Fri, 18 Apr 2008, 20:59:54 CET