Aufbringung von Siliziumschichten durch Plasma-CVD und Anwendung auf Beschichtungen in einer Plasma-Wirbelschicht

Metadata Label Value
Author(s): Bayer, Christian
Publisher: VDI Verlag
Citation:

Bayer, Christian. Aufbringung von Siliziumschichten durch Plasma-CVD und Anwendung auf Beschichtungen in einer Plasma-Wirbelschicht. VDI Verlag (1998). http://dx.doi.org/10.3929/ethz-a-001915475

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (19.15KB) , Fulltext (13.66MB)
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Detailed Information

Metadata Description
Title Aufbringung von Siliziumschichten durch Plasma-CVD und Anwendung auf Beschichtungen in einer Plasma-Wirbelschicht
Author(s) Bayer, Christian
Publication Place Düsseldorf
Publisher VDI Verlag
Publication Date 1998
Notes Diss. Techn. Wiss. ETH Zürich, Nr. 12502, 1998. Ref.: Ph. Rudolf von Rohr ; Korref.: J. Engemann
Series Fortschritt-Berichte VDI. Reihe 3, Verfahrenstechnik Nr. 534
Language German
DOI http://dx.doi.org/10.3929/ethz-a-001915475
ISBN 3-18-353403-7
Subject(s) Mechanical Engineering, General
Keyword(s) APPLIED PLASMA PHYSICS
CHEMICAL VAPOUR DEPOSITION
PRODUCTION ENGINEERING
SILICON OXIDES
INORGANIC CHEMISTRY
THIN LAYER FORMATION BY VAPORIZATION AND CONDENSATION
PHYSICS OF MOLECULAR SYSTEMS
Description File Name MIME Type Size
Abstract   eth-22578-01.pdf application/pdf 19.15KB
Fulltext   eth-22578-02.pdf application/pdf 13.66MB
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E-Collection record created: Fri, 18 Apr 2008, 20:59:54 CET