Dopant clustering and diffusion in silicon

Metadata Label Value
Author(s): Vollenweider, Kilian
Publisher: ETH
Citation:

Vollenweider, Kilian. Dopant clustering and diffusion in silicon. ETH (2010). http://dx.doi.org/10.3929/ethz-a-006192842

Document Type: Doctoral and Habilitation Theses  
Documents: Abstract (64.91KB), Fulltext (2.85MB)
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Detailed Information

Metadata Description
Title Dopant clustering and diffusion in silicon
Author(s) Vollenweider, Kilian
Publication Place Zürich
Publisher ETH
Publication Date 2010
Notes Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 19255, 2010
Language English
DOI http://dx.doi.org/10.3929/ethz-a-006192842
Subject(s) Condensed Matter
Keyword(s) NUMERICAL SIMULATION AND MATHEMATICAL MODELING
DOPING
SEMICONDUCTOR TECHNOLOGY
PHYSICS OF MOLECULAR SYSTEMS
SILICON
CHEMICAL ELEMENTS
DENSITY FUNCTIONALS
QUANTUM CHEMISTRY AND QUANTUM MECHANICS
Description File Name MIME Type Size
Abstract   eth-1880-01.pdf application/pdf 64.91KB
Fulltext   eth-1880-02.pdf application/pdf 2.85MB
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E-Collection record created: Thu, 28 Oct 2010, 04:23:24 CET