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Size effects in thin film nickel-based alloys for (N)MEMS applications
| Metadata Label | Value |
|---|---|
| Author(s): | Borgia, Cesare |
| Publisher: | ETH |
| Citation: | Borgia, Cesare. Size effects in thin film nickel-based alloys for (N)MEMS applications. ETH (2010). http://dx.doi.org/10.3929/ethz-a-006119486 |
| Document Type: | Doctoral and Habilitation Theses |
| Documents: |
Abstract
(99.72KB),
Fulltext
(6.40MB) |
Detailed Information
| Metadata | Description |
|---|---|
| Title | Size effects in thin film nickel-based alloys for (N)MEMS applications |
| Author(s) | Borgia, Cesare |
| Publication Place | Zürich |
| Publisher | ETH |
| Publication Date | 2010 |
| Notes | Diss., Eidgenössische Technische Hochschule ETH Zürich, Nr. 18998, 2010 |
| Language | English |
| DOI | http://dx.doi.org/10.3929/ethz-a-006119486 |
| Subject(s) | Microelectronics, Integrated Circuits |
| Keyword(s) |
NICKEL ALLOYS MICROELECTROMECHANICAL COMPONENTS ELECTRICAL ENGINEERING ELECTRICAL AND DIELECTRICAL PROPERTIES OF THIN FILMS PHYSICS OF MOLECULAR SYSTEMS |
| Description | File Name | MIME Type | Size |
|---|---|---|---|
| Abstract |
eth-1570-01.pdf |
application/pdf | 99.72KB |
| Fulltext |
eth-1570-02.pdf |
application/pdf | 6.40MB |
| Description | URL |
|---|---|
| NEBIS Link | http://opac.nebis.ch/F/?local_base=NEBIS&func=find-b&find_code=SYS&request=006119486 |
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E-Collection record created: Sat, 31 Jul 2010, 04:29:52 CET