9 Results for (keywords_en:MICROMECHANICS)

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3. Encapsulated micromachined resonant force sensor

Haueis, Martin (2001)


Doctoral and Habilitation Theses

5. CMOS flow sensors

Moser, David (1993)


Doctoral and Habilitation Theses

7. Micromanipulation of small particles with ultrasound

Haake, Albrecht (2004)


Doctoral and Habilitation Theses